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01. What is MFC? (Mass Flow Controller) 본문
01. What is MFC? (Mass Flow Controller)
Do what you love 2021. 10. 2. 14:08
1. What is MFC?
- MFC stands for Mass Flow Controller and refers to a mass flow control device as the term implies.
- The mass flow unit of the MFC is generally SCCM or SLM*.
* SCCM and SLM are units representing the flow rate in the standard state,
and please refer to the link below for more information.
01. What is SCCM & SLM? Why do we use this unit? (Including examples)
1. What is SCCM & SLM? A. What is SCCM? (Standard Cubic Centimeter per Minute) Just like the term, It is a unit representing 'how many cc per minute the gas flows in the standard state'. (1cc=1㎤) I..
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2. When will MFC be used?
- It is used to flow gas from a specific location to another location.
- It also plays a role in controlling the MFC to flow by the desired mass flow rate
when it wants to keep the mass flow rate of the gas constant.
- For example, if you take the above image,
When you want to control the flow of 5000 SCCM from A to B,
the MFC of 5000 SCCM is located between A and B to achieve the desired mass flow rate.
The above article is for reference to help the company's purchasing, sales, and design personnel.
Unauthorized distribution is prohibited.