알기 쉬운 기술 지식, 한 눈에 보는 업체 비교

1. What is SCCM & SLM? A. What is SCCM? (Standard Cubic Centimeter per Minute) Just like the term, It is a unit representing 'how many cc per minute the gas flows in the standard state'. (1cc=1㎤) In this case, the standard state means 0 degrees Celsius and 1 atm. (1 atm = 1 atmosphere = atmospheric pressure) That is, 1000 SCCM in the standard state means that 1000cc of gas flows per minute. B. W..